Sacrificial cathode target for sputtering cathode assembly

Details Sacrificial cathode target for sputtering cathode assembly Sacrificial cathode target for sputtering cathode assembly

2006-01-17

2009-12-01

McDonald, Rodney G (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298120, C204S298190

Reexamination Certificate

active

07625471

ABSTRACT:
A sputtering cathode assembly attachable to a cathode mounting plate for a thin-film vapor deposition chamber. The cathode assembly includes a magnet module and a cathode body generally coextensive with and sealingly housing the magnet module and defining a water channel between a top plate of the cathode body and a cooling channel plate of the magnet module. An elongated target is releasably connected atop and coextensive with the top plate and secured in place by a unique threaded fastener engagement between a target clamp and an edge portion of the cathode body whereby the target is replaceable without disassembly of the cathode body. Unique replaceable elongated fastener receiving inserts releasably secure said target against the target plate to effect target replacement without disassembly of the cathode body.

REFERENCES:
patent: 7087145 (2006-08-01), Choquette et al.

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