Ruthenium silicide wet etch

Details Ruthenium silicide wet etch Ruthenium silicide wet etch

2005-06-21

2005-06-21

Norton, Nadine G. (Department: 1765)

Compositions

Etching or brightening compositions

C252S079200, C252S079300, C438S745000, C438S755000

Reexamination Certificate

active

06908569

ABSTRACT:
A method of removing ruthenium silicide from a substrate surface which comprises exposing the ruthenium silicide surface to a solution containing chlorine and fluorine containing chemicals. In particular, said solution is designed to react with said ruthenium silicide film such that water-soluble reaction products are formed.

REFERENCES:
patent: 205292 (1983-12-01), None
patent: 817123 (1959-07-01), None
patent: 0927989 (1997-10-01), None
patent: WO 00/13215 (2000-03-01), None

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