Ruthenium film, ruthenium oxide film and process for forming...

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Reexamination Certificate

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C428S702000, C556S136000, C556S137000, C427S255280, C427S255310, C427S376200

Reexamination Certificate

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06875518

ABSTRACT:
A composition capable of forming a metal ruthenium film and a ruthenium oxide film by a simple application/baking process, a process for forming a metal ruthenium film and a ruthenium oxide film from the composition, a metal ruthenium film and a ruthenium oxide film formed by the process, and electrodes formed of the films.A solution composition comprising a specific ruthenium complex. The coating film of this solution composition is heated in an atmosphere containing no oxygen or an atmosphere containing oxygen to form a metal ruthenium film or a ruthenium oxide film, respectively, and electrodes formed of the films.

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