Ruthenium electroplating and baths and compositions therefor

Details Ruthenium electroplating and baths and compositions therefor Ruthenium electroplating and baths and compositions therefor

1980-04-09

1981-10-27

Kaplan, G. L.

Chemistry: electrical and wave energy

Processes and products

200262, 260429R, G01N 352, C07F 1702

Patent

active

042971780

ABSTRACT:
The invention provides a bath that is operable at, or close to, pH 7 to deposit a coating of ruthenium on a substrate, e.g. the contacts of electrical switches, which does away with the need to provide a protective coating on the substrate prior to ruthenium plating. The bath consists essentially of (i) a compound or a complex that contains a nitrogen bridge linkage joining together two ruthenium atoms and (ii) an aqueous solution of oxalic acid or an oxalate.

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