Ruthenium compound and process for producing a metal...

Details Ruthenium compound and process for producing a metal... Ruthenium compound and process for producing a metal...

2007-07-03

2007-07-03

Nazario-Gonzalez, Porfirio (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C556S009000, C427S252000

Reexamination Certificate

active

10537484

ABSTRACT:
A ruthenium compound from which high-quality film-like metal ruthenium can be obtained and a process for producing a metal ruthenium film from the ruthenium compound by chemical vapor deposition.The ruthenium compound as a material for chemical vapor deposition is represented by the following formula (1), for example

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