Cleaning and liquid contact with solids – Apparatus – With non-impelling fluid deflector or baffle other than...
Patent
1996-09-16
1998-07-07
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
With non-impelling fluid deflector or baffle other than...
134902, B08B 304
Patent
active
057753504
ABSTRACT:
A flow regulation means 7 for a wash liquid 5 is constituted by first and second regulator plates 11 and 12 in the form of perforated plates and a third regulator plate 13 in the form of a fibrous plate, the first to third regulator plates 11 to 13 being successively located in spaced positions from upstream to downstream side.
Akanuma Shigeo
Fujii Masashi
Coe Philip R.
Speedfam Clean System Co., Ltd.
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