Rugged 02 microsensor

Details Rugged 02 microsensor Rugged 02 microsensor

1992-04-02

1994-02-01

Niebling, John

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204424, 204426, 204428, 204429, G01N 2726

Patent

active

052829480

ABSTRACT:
A rugged O.sub.2 microsensor constructed from Si, and Pt, Si.sub.3 N.sub.4 and ZrO.sub.2 thin films which is free standing and isolated from the silicon substrate in combination with a counter electrode and a heater in a bow-tie configuration. The sensor combines an integral heater made from platinum which is deposited on a silicon wafer as a thin film. The thin film heater heats a small yttria-stabilized zirconia sensor that sends a signal proportional to the amount of oxygen in the ambient environment through a counter electrode. The sensor and heater are supported on the silicon wafer by a thin layer of silicon nitride.

REFERENCES:
patent: 4587105 (1986-05-01), Bonne et al.
patent: 4908119 (1990-03-01), Saito et al.

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