Row electrode anodization

Details Row electrode anodization Row electrode anodization

1997-09-30

2000-11-21

Gorgos, Kathryn

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating selected area

205324, 205325, 205121, C25D 502, H01L 21288, H01L 21445

Patent

active

061497924

ABSTRACT:
A structure and method for forming an anodized row electrode for a field emission display device. In one embodiment, the present invention comprises depositing a resistor layer over portions of a row electrode. Next, an inter-metal dielectric layer is deposited over the row electrode. In the present embodiment, the inter-metal dielectric layer deposited over portions of the resistor layer and over pad areas of the row electrode. After the deposition of the inter-metal dielectric layer, the row electrode is subjected to an anodization process such that exposed regions of the row electrode are anodized. In so doing, the present invention provides a row electrode structure which is resistant to row to column electrode shorts and which is protected from subsequent processing steps.

REFERENCES:
patent: 5243252 (1993-09-01), Kaneko et al.
patent: 5397957 (1995-03-01), Zimmerman
patent: 5498925 (1996-03-01), Bell et al.
patent: 5591352 (1997-01-01), Peng
patent: 5643817 (1997-07-01), Kim et al.
patent: 5731216 (1998-03-01), Holmberg et al.

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