Row electrode anodization

Details Row electrode anodization Row electrode anodization

1998-10-29

1999-08-24

Patel, Vip

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313336, 313351, 313495, H01J 102

Patent

active

059428414

ABSTRACT:
A structure and method for forming an anodized row electrode for a field emission display device. In one embodiment, the present invention comprises depositing a resistor layer over portions of a row electrode. Next, an inter-metal dielectric layer is deposited over the row electrode. In the present embodiment, the inter-metal dielectric layer deposited over portions of the resistor layer and over pad areas of the row electrode. After the deposition of the inter-metal dielectric layer, the row electrode is subjected to an anodization process such that exposed regions of the row electrode are anodized. In so doing, the present invention provides a row electrode structure which is resistant to row to column electrode shorts and which is protected from subsequent processing steps.

REFERENCES:
patent: 5397957 (1995-03-01), Zimmerman

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