Rough surface profiler and method

Details Rough surface profiler and method Rough surface profiler and method

1992-05-06

1993-04-20

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356381, 250561, 382 8, G01B 1124

Patent

active

052047342

ABSTRACT:
A method of profiling a rough surface of an object includes moving the object along a z axis so that a highest point of the rough surface is optically aligned with and outside of the focus range of a solid-state imaging array. An interferogram of the rough surface then is produced by means of a two beam interferometer. The solid-state imaging array is operated to scan the rough surface along x and y axes to produce intensity data for each pixel of the solid-state imaging array for a plurality of frames each shifted from the other by a preselected phase difference. The modulation for each pixel is computed from the intensity data. The most recently computed modulation of each pixel is compared with a stored prior value of modulation of that pixel. The prior value is replaced with the most recently computed value if the most recently computed value is greater. The object is incrementally moved a selected distance along the z axis, and the foregoing procedure is repeated until maximum values of modulation and corresponding relative height of the rough surface are obtained and stored for each pixel.

REFERENCES:
patent: 4732483 (1988-03-01), Biegen
patent: 4791584 (1988-12-01), Greivenkamp, Jr.
patent: 4813782 (1989-03-01), Yagi et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4832489 (1989-05-01), Wyant et al.
patent: 4931630 (1990-06-01), Cohen et al.
"Profilometry with a Coherence Scanning Microscope", by B. S. Lee, and T. C. Strand, Applied Optics, vol. 29, No. 26, Sep. 10, 1990, pp. 3784-3788.
"First Results of a Product Utilizing Coherence Probe Imaging for Wafer Inspection", by M. Davidson, K. Kaufman, and I. Mazor, SPIE, vol. 921, Integrated Circuit Metrology, Inspection, and Process Control II (1988); pp. 100-114.
"An Application of Interference Microscopy to Integrated Circuit Inspection and Metrology", by M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, SPIE vol. 775, Integrated Circuit Metrology, Inspection & Process Control (1987), pp. 233-247.

Affiliated with

Also associated with

Rating

Rough surface profiler and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rough surface profiler and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rough surface profiler and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1529269