Rough and fine movement device, and liquid supply device...

Details Rough and fine movement device, and liquid supply device... Rough and fine movement device, and liquid supply device...

2008-04-22

2011-11-01

Benson, Walter (Department: 2837)

Electricity: motive power systems

Positional servo systems

C318S649000

Reexamination Certificate

active

08049454

ABSTRACT:
A rough and fine movement device capable of moving a mobile body with high accuracy, and a liquid supply device incorporating such a device. First and second mobile bodies are movable along guide members with a connection member connecting the mobile bodies in a relatively movable manner. A first drive mechanism roughly moves the first mobile body by a first stroke. A second drive mechanism between the first and the second mobile bodies, finely moves the second mobile body relative to the first mobile body by a second stroke. The second drive mechanism on one of the first and second mobile bodies and includes an actuator having a contactor with a first contact surface. The other of the bodies includes a second contact surface which contacts the first contact surface. At least one of the first contact surface or the second contact surface is spherical.

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