Rotor for turbomolecular pump

Details Rotor for turbomolecular pump Rotor for turbomolecular pump

1997-04-18

1999-05-18

Kwon, John

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

F01D1/36

Patent

active

059044691

ABSTRACT:
The present invention relates to a rotor of a vacuum pump comprising a rotatable shaft and a plurality of spaced apart parallel rotor disks secured to said rotatable shaft, such rotor being provided with a corrosion-resistant protective coating formed by a layer of polymeric material.

REFERENCES:
patent: 4826394 (1989-05-01), Lotz
patent: 5154978 (1992-10-01), Nakayama et al.
patent: 5350275 (1994-09-01), Ishimaru
patent: 5395221 (1995-03-01), Tucker, Jr. et al.
patent: 5547338 (1996-08-01), Conrad et al.

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