Rotational vibration gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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G01P 904

Patent

active

053775449

ABSTRACT:
A rotor affixed to a central mounting post by helical springs for oscillatory rotary movement about the post. The post defining a Z axis and the sensing capacitors adjacent the rotor defining X and Y axes. The rotor, helical springs and post being formed of polysilicon in a single semiconductor process step,

REFERENCES:
patent: 5203208 (1993-04-01), Bernstein

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