Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1994-08-01
1996-04-30
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350412, G01P 904
Patent
active
055114199
ABSTRACT:
A rotor affixed to a central mounting post by helical springs for oscillatory rotary movement about the post. The post defining a Z axis and the sensing capacitors adjacent the rotor defining X and Y axes. The rotor, helical springs and post being formed of polysilicon in a single emiconductor process step.
REFERENCES:
patent: 5203208 (1993-04-01), Bernstein
Moller Richard A.
Motorola
Parsons Eugene A.
Williams Hezron E.
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