Rotational micro mirror

Details Rotational micro mirror Rotational micro mirror

2007-08-14

2007-08-14

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Deflection using a moving element

Pivotal or rotational element

C359S224200, C359S225100, C359S196100

Reexamination Certificate

active

11408049

ABSTRACT:
A rotational micro mirror is rapidly driven, has a large driving angle, and is structurally stable. The rotational micro mirror includes: a substrate; a reflection plate which is rotatable and reflects light; a pair of torsion springs which support opposite ends of the reflection plate so that the reflection plate is raised from the substrate, and acting as a rotation axis when the reflection plate is rotationally driven; a pair of frames which are connected to the reflection plate without connecting to the torsion springs and are symmetrically formed with respect to the torsion springs; frame supporting units which connect the reflection plate and the frames; and a driving unit including moving combs disposed on the frames and static combs disposed on the substrate and respectively corresponding to the moving combs in order to generate an electrostatic force.

REFERENCES:
patent: 6774445 (2004-08-01), Mutoh et al.
patent: 6914710 (2005-07-01), Novotny et al.
patent: 6995495 (2006-02-01), Ko et al.
patent: 2003/0007262 (2003-01-01), Tsuboi et al.

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