Rotational deviation detecting method and system using a periodi

Details Rotational deviation detecting method and system using a periodi Rotational deviation detecting method and system using a periodi

1994-10-28

1996-08-27

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356356, 356363, 250548, G01B 1100, G01B 902

Patent

active

055506356

ABSTRACT:
A deviation detecting system for detecting a rotational deviation of an object, includes a pattern formed on the object and having a periodicity, a light source for providing light, a detecting device for projecting the light from the light source onto the pattern and for detecting at least two diffraction lights from the pattern with a predetermined detection plane, and a determining device for determining a rotational deviation of the object with respect to a predetermined axis, on the basis of the positions of incidence of the diffraction lights upon the detection plane as detected through the detection by the detecting device.

REFERENCES:
patent: 4433585 (1984-02-01), Levine
patent: 4804270 (1989-02-01), Miller et al.
patent: 5196711 (1993-03-01), Matsugu et al.
patent: 5285259 (1994-02-01), Saitoh
patent: 5313272 (1994-05-01), Nose et al.
patent: 5333050 (1994-07-01), Nose et al.
patent: 5347356 (1994-09-01), Ota et al.
patent: 5369486 (1994-11-01), Matsumoto et al.

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