Rotation-rate sensor

Details Rotation-rate sensor Rotation-rate sensor

2007-08-28

2007-08-28

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Centrifugal weight type

C073S504080, C073S504120, C073S504180

Reexamination Certificate

active

10513907

ABSTRACT:
A micromechanical rotation-rate sensor includes a substrate, an anchoring device provided on the substrate, as well as a first spiral spring device and a second spiral spring device, the two spiral spring devices being provided next to one another in mirror symmetry along their greatest extension, and the two spiral spring devices together form one spiral spring apparatus. The sensor further includes a centrifugal mass connected to the anchoring device via the first spiral spring device connected to the centrifugal mass so that the centrifugal mass is elastically deflectable from its neutral position, about a rotational axis situated perpendicularly to a substrate surface, so that the centrifugal mass is capable of rotary oscillation. In addition, the first spiral spring device includes a bend at its anchoring region with the anchoring device.

REFERENCES:
patent: 5313835 (1994-05-01), Dunn
patent: 5650568 (1997-07-01), Greiff et al.
patent: 5952572 (1999-09-01), Yamashita et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 6776041 (2004-08-01), Hauer et al.
patent: 96 35957 (1996-11-01), None

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