Rotation rate sensor

Details Rotation rate sensor Rotation rate sensor

1993-12-30

1995-08-08

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

054388708

ABSTRACT:
A rotation rate sensor has a multi-layer structure including a monocrystalline silicon layer (10) which forms a carrier structure and a polysilicon layer (21), forming a second layer, and which includes a structural element (30) which acts as an oscillatory body. This structural element (30) is supported on the carrier structure (10) by a plurality of support strips (31), and is deflectable (2) perpendicularly to the major surface of the carrier structure (10). Capacitative or piezo-resistive detecting elements are formed from the second layer for detecting Coriolis force deflections (2), perpendicular to the major surface of said carrier (10) of the structural element (30).

REFERENCES:
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 5025346 (1991-06-01), Tang et al.

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