Rotation measuring apparatus and displacement measuring apparatu

Optics: measuring and testing – By polarized light examination – With light attenuation

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Details

356356, 25023116, 250237G, G01D 534, G01B 1102

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active

055596029

ABSTRACT:
A rotation measuring apparatus has a grating disposed on a cylindrical surface along the circumferential direction thereof, an illuminating system for applying a light beam to a first location on the grating, light emerging from the first location by the application of the light beam from the illuminating system being incident on a second location on the grating, light beams for detection emerging in a plurality of directions from the second location on which the light is incident, a plurality of light receiving elements for detecting the light beams for detection, respectively, the relative rotation information of the grating and the light receiving elements being measured by the detection by the light receiving elements, and light intercepting means for preventing the light beam for detection which should enter at least one of the light receiving elements from entering a different light receiving element.

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patent: 5260568 (1993-11-01), Ieki
patent: 5302821 (1994-04-01), Igaki et al.
patent: 5323001 (1994-06-01), Igaki et al.
patent: 5359193 (1994-10-01), Nyui et al.
patent: 5369271 (1994-11-01), Nyui

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