Rotation-magnetron-in-magnetron (RMIM) electrode, method of...

Details Rotation-magnetron-in-magnetron (RMIM) electrode, method of... Rotation-magnetron-in-magnetron (RMIM) electrode, method of...

2006-10-10

2006-10-10

Dinh, Trinh Vo (Department: 2821)

Electric lamp and discharge devices: systems

Combined load device or load device temperature modifying...

Distributed parameter resonator-type magnetron

C315S111410, C204S298200, C118S7230CB

Reexamination Certificate

active

07119489

ABSTRACT:
An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.

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