Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating moving substrate
Patent
1999-07-28
2000-07-04
Valentine, Donald R.
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating moving substrate
205157, 205334, 205656, 205686, 205687, 204212, 204225, 204269, 204284, 204471, C25D 500, C25D 712, C25D 1700, C25B 900, C25B 1100
Patent
active
060833769
ABSTRACT:
An electrochemical reaction assembly and methods of inducing electrochemical reactions, such as for deposition of materials on semiconductor substrates. The assembly and method achieve a highly uniform thickness and composition of deposition material or uniform etching or polishing on the semiconductor substrates by retaining the semiconductor substrates on a cathode immersed in an appropriate reaction solution wherein a wire mesh anode rotates about the continuous moving cathode during electrochemical reaction.
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Akram Salman
Hembree David R.
Micro)n Technology, Inc.
Valentine Donald R.
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