Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating moving substrate
Patent
1997-07-28
2000-03-07
Valentine, Donald R.
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating moving substrate
205157, 205334, 205686, 205687, 204212, 204225, 204269, 204284, 204471, 204656, C25D 712, C25D 1700, C25F 300, C25F 700
Patent
active
060335483
ABSTRACT:
An electrochemical reaction assembly and methods of inducing electrochemical reactions, such as for deposition of materials on semiconductor substrates. The assembly and method achieve a highly uniform thickness and composition of deposition material or uniform etching or polishing on the semiconductor substrates by retaining the semiconductor substrates on a cathode immersed in an appropriate reaction solution wherein a wire mesh anode rotates about the continuous moving cathode during electrochemical reaction.
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Akram Salman
Hembree David R.
Micro)n Technology, Inc.
Valentine Donald R.
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