Rotating magnetron incorporating a removable cathode

Details Rotating magnetron incorporating a removable cathode Rotating magnetron incorporating a removable cathode

1990-10-18

1992-03-31

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429809, 20429823, C23C 1435

Patent

active

051005271

ABSTRACT:
A rotatable magnetron having a cathode and a bearing assembly wherein the cathode may be removed from a coating chamber while the bearing assembly remains in place.

REFERENCES:
patent: 4166018 (1979-08-01), Chapin
patent: 4356073 (1982-10-01), McKelvey
patent: 4422916 (1983-12-01), McKelvey
patent: 4433318 (1984-04-01), McKelvey
patent: 4445997 (1984-05-01), McKelvey
patent: 4466877 (1984-08-01), McKelvey
patent: 4519885 (1985-05-01), Innis

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