Rotating floating magnetron dark-space shield and cone end

Details Rotating floating magnetron dark-space shield and cone end Rotating floating magnetron dark-space shield and cone end

1994-08-04

1996-10-22

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429822, C23C 1435

Patent

active

055672892

ABSTRACT:
A rotatable magnetron cathode having at least one supported end adapted for attachment to a spindle. At least one dark space shield is attached to the cathode at a supported end to rotate therewith, and is electrically floating relative to the cathode. If the cathode is cantilever mounted, a floating cone end shield, facing away from the gas discharge and not overlapping the cylindrical cathode wall, is used at the free end.

REFERENCES:
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patent: 5464518 (1995-11-01), Sieck et al.
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M. Wright et al., "Design advances and applications of the rotatable cylindrical magnetron," Journal of Vacuum Science and Technology A, vol. 4, No. 3, May/Jun. 1986, pp. 388-392.

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