Electric lamp and discharge devices – With movable electrode or shield – Rotary
Patent
1995-10-10
1996-07-23
O'Shea, Sandra L.
Electric lamp and discharge devices
With movable electrode or shield
Rotary
313148, 315 3951, 315 3963, 315 3967, 20429823, 20429822, H01J 2122, C23C 1500
Patent
active
055392725
ABSTRACT:
A rotatable magnetron cathode having at least one supported end adapted for attachment to a spindle. At least one dark space shield is attached to the cathode at a supported end to rotate therewith, and is electrically floating relative to the cathode.
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M. Wright et al., "Design advances and applications of the rotatable cyllindrical magnetron," Journal of Vacuum Science and Technology A, vol. 4, No. 3, May/Jun. 1986, pp. 388-392.
Crowley Daniel T.
Taylor Clifford L.
O'Shea Sandra L.
Patel Ashok
Viratec Thin Films, Inc.
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