Rotating floating magnetron dark-space shield

Electric lamp and discharge devices – With movable electrode or shield – Rotary

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313148, 315 3951, 315 3963, 315 3967, 20429823, 20429822, H01J 2122, C23C 1500

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active

055392725

ABSTRACT:
A rotatable magnetron cathode having at least one supported end adapted for attachment to a spindle. At least one dark space shield is attached to the cathode at a supported end to rotate therewith, and is electrically floating relative to the cathode.

REFERENCES:
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patent: 4362611 (1982-12-01), Logan et al.
patent: 4407713 (1983-10-01), Zega
patent: 4422916 (1983-12-01), McKelvey
patent: 4443318 (1984-04-01), McKelvey
patent: 4445997 (1984-05-01), McKelvey
patent: 4466877 (1984-08-01), McKelvey
patent: 5100527 (1992-03-01), Stevenson et al.
patent: 5200049 (1993-04-01), Stevenson et al.
patent: 5213672 (1993-05-01), Hartig et al.
M. Wright et al., "Design advances and applications of the rotatable cyllindrical magnetron," Journal of Vacuum Science and Technology A, vol. 4, No. 3, May/Jun. 1986, pp. 388-392.

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