Rotating cup type liquid supply device

Details Rotating cup type liquid supply device Rotating cup type liquid supply device

1996-10-28

1998-07-28

Chin, Peter

Coating apparatus

Projection or spray type

Rotating turret work support

118 52, 118500, B05B 1302, B05C 1300

Patent

active

057857598

ABSTRACT:
A rotating cup type liquid supply device comprises an inner cup 3, a vacuum chuck 5 disposed in the center of a bottom surface of the inner cup 3 for holding thereon a planar material W to be treated, and a tray 7 fixed onto the bottom surface of the inner cup 3 for substantially surrounding the planar material W held by the vacuum chuck 5. The tray is of a substantially rectangular shape in plan view and includes an tapered wall portion 9 turned inwardly along a circumferential wall portion thereof for defining an upper opening 8 of the tray 7. The tray 7 further includes a plurality of drain guiding conduits 10 each extending at a predetermined angle outwardly from an outer peripheral portion thereof. Also, the tray can be provided thereon with the cover having an opening slightly larger than the planar material W.

REFERENCES:
patent: 5415691 (1995-05-01), Fujiyama et al.
patent: 5439519 (1995-08-01), Sago et al.

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