Rotating belt wafer edge cleaning apparatus

Details Rotating belt wafer edge cleaning apparatus Rotating belt wafer edge cleaning apparatus

1996-12-30

1999-02-09

Warden, Jill

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134902, 15 971, 15102, 451 44, B08B 700, A47L 102

Patent

active

058688579

ABSTRACT:
An apparatus for cleaning edges and/or bevel areas of substrates. In one embodiment, the present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based upon friction at the contact point between the wafer and a rotating belt.

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