Rotatable substrate holder for use in vacuum

Coating apparatus – With cutting – punching or tearing of work – Web or sheet work

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Details

118500, 427248G, C23C 1302

Patent

active

041081072

ABSTRACT:
A substrate or part holder is disclosed which allows rotation of at least two parts about their individual axes as well as rotation of all of the parts about a main axis. The part holder has a stub shaft for receiving each part, and a hollow housing attached to the end of a hollow shaft. An interior shaft is rotatable inside the hollow shaft and a central gear engages a gear on each stub shaft inside of the housing. Means are provided for mounting a part on each stub shaft outside of the housing. Rotation of the hollow shaft will cause rotation of all of the parts about the common axis, while any differential in rotation between the hollow shaft and the interior shaft will cause rotation of each part about the axis of the stub shaft to which it is attached.

REFERENCES:
patent: 3019129 (1962-01-01), Walsh
patent: 3424628 (1969-01-01), Winings
patent: 3425926 (1969-02-01), Hojyo
patent: 3456616 (1969-07-01), Gleim et al.
patent: 3530824 (1970-09-01), Illsley
patent: 3656453 (1972-04-01), Tousimis
patent: 3662708 (1972-05-01), Shrader
patent: 3783822 (1974-01-01), Wollam
patent: 3858547 (1975-01-01), Bergfelt
patent: 3889632 (1975-06-01), Brunner et al.
patent: 3911162 (1975-10-01), Erhart et al.

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