Rotatable micromachined device for sensing magnetic fields

Details Rotatable micromachined device for sensing magnetic fields Rotatable micromachined device for sensing magnetic fields

1996-02-22

1998-10-06

Snow, Walter E.

Electricity: measuring and testing

Magnetic

Magnetometers

324260, 324658, G01R 3302, G01R 3300, G01R 2726, G01L 504

Patent

active

058182276

ABSTRACT:
A micromachined magnetometer is built from a rotatable micromachined structure on which is deposited a ferromagnetic material magnetized along an axis parallel to the substrate. A structure rotatable about the Z-axis can be used to detect external magnetic fields along the X-axis or the Y-axis, depending on the orientation of the magnetic moment of the ferromagnetic material. A structure rotatable about the X-axis or the Y-axis can be used to detect external magnetic fields along the Z-axis. By combining two or three of these structures, a dual-axis or three-axis magnetometer is obtained.

REFERENCES:
patent: 5036286 (1991-07-01), Holm-Kennedy et al.
patent: 5233213 (1993-08-01), Marek
patent: 5392658 (1995-02-01), Okada
Microtorquemeter for Magnetization Measurements on Small Superconducting Samples, Review of Scientific Instruments, Dec. 1992, No. 12, pp. 5726-5732.
UHV Cantilever Beam Technique for Quantitative Measurements . . . of Ultrathin Magnetic Films, Physical Review Letters, Aug. 1994, v. 73 No. 8, pp. 1166-1169.

Affiliated with

Also associated with

Rating

Rotatable micromachined device for sensing magnetic fields does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rotatable micromachined device for sensing magnetic fields, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rotatable micromachined device for sensing magnetic fields will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-82204