Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent
1997-10-09
1999-11-09
Ro, Bentsu
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
414935, 7449008, 744901, 269 71, H01L 2168, B23Q 318
Patent
active
059821329
ABSTRACT:
A method and apparatus for positioning rectilinearly a wafer holding platform by performing rotations in a positioning system. A method comprises coupling a first clamp to a wafer holding platform, decoupling a second clamp from the wafer holding platform, and rotating the first clamp to cause the wafer holding platform to be moved to a first position. Further couplings, decouplings, and rotations may be performed to achieve a rectilinear translation to a final position without a resultant rotation after the rectilinear translation. An apparatus of the invention comprises a first clamp having a first axis of rotation, a second clamp having a second axis of rotation, where the first axis and the second axis are not concentric. A wafer holding platform is independently couplable to the first clamp and to the second clamp and has a plurality of points on the wafer holding platform which are positionable at a plurality of X,Y locations by rotating independently the first and second clamps.
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Electroglas, Inc.
Ro Bentsu
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