Rotary vacuum pump

Details Rotary vacuum pump Rotary vacuum pump

1983-02-16

1985-04-23

Freeh, William L.

Pumps

Motor driven

Including means utilizing pump fluid for augmenting cooling,...

417372, 417424, 310 52, 310 55, 415 90, 415169A, F04B 1700, F04B 3906, H02K 900

Patent

active

045127255

ABSTRACT:
A hard vacuum pump of the type having a pump body (4) to which a multi-stage stator (3) and a multi-stage rotor (2) mounted on a shaft (1) are connected, said shaft (1) being driven by a motor and rotating in at least two ball bearings (5, 6) disposed in a sleeve (18) formed by an extension of said pump body (4), a dynamic molecular seal (7) being set on said shaft (1) at the body end of the sleeve (18), wherein the opposite end (11) of the sleeve (18) is closed, a nozzle (8) communicating with an outside source of gas being provided at said closed end (11), said pump body (4) also being connected to an exterior primary vacuum pump whereby said ball bearings (5, 6), and the rotor (9) of said motor are permanently swept by said gas entering via said nozzle and leaving via said dynamic seal, said gas flowing at a pressure intermediate between atmospheric pressure and the pump discharge pressure.
The invention is used in microelectronics techniques.

REFERENCES:
patent: 1230206 (1917-06-01), Niemayer
patent: 1657550 (1928-01-01), Saathoff
patent: 3355179 (1967-11-01), McGrew
patent: 3969042 (1976-07-01), Bachler
patent: 4332522 (1982-06-01), Saulgeot

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