Rotary-type slice dryer

Details Rotary-type slice dryer Rotary-type slice dryer

1977-05-02

1978-05-09

Weakley, Harold W.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

210512R, 233 22, F26B 1724

Patent

active

040879240

ABSTRACT:
A rotary-type dryer for use in drying slices such as semiconductor wafers includes a rotatable basket for accommodating the slices to be dried. A plurality of blades are arranged in a circle concentric with the axis of rotation of the basket. The blades are disposed at an angle relative to the tangential direction of the circle. A case is provided outside the blades and the basket and includes an air-and-liquid exhaust port. An air intake port allows drying air to be introduced into the basket.

REFERENCES:
patent: 3014642 (1961-12-01), Lundberg
patent: 3092582 (1963-06-01), Lacker

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