Rotary shaft sealing mechanism and liquid processing apparatus

Details Rotary shaft sealing mechanism and liquid processing apparatus Rotary shaft sealing mechanism and liquid processing apparatus

2008-03-25

2008-03-25

Stinson, Frankie L. (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S153000, C134S902000, C277S917000

Reexamination Certificate

active

10393882

ABSTRACT:
The present invention provides a rotary shaft sealing mechanism having the seal between the rotary shaft and the seal ring improved, and a liquid processing apparatus including the rotary shaft sealing mechanism.The cleaning processing apparatus1comprises a rotor34for holding wafers W, an outer chamber71aand an inner chamber71bwhich can house the rotor34,a spindle50for rotating the rotor34,and an outer cylindrical member32disposed around the spindle50.A first sealing ring13,etc. of resins are provided in a ring member12constituting the outer cylindrical member32.A clearance between the spindle50and the first sealing ring13is adjusted by press inserting the spindle50into the first sealing ring13,etc. and rotating the spindle50for a prescribed period of time to abrade the fist sealing ring13,etc.

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patent: 11-111511 (1999-04-01), None

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