Rotary processing apparatus

Details Rotary processing apparatus Rotary processing apparatus

1998-01-23

1999-09-21

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134153, 134157, 134902, 34 58, 414941, B08B 304

Patent

active

059540729

ABSTRACT:
A rotary processing apparatus comprises a rotary table on which a substrate to be processed is placed, a rotary drive means for rotating the rotary table, a plurality of holding members each rotating together with the rotary table having a rotation supporting point at a position close to a peripheral portion of the rotary table, for holding a peripheral portion of the substrate above the rotary table, and including one end having a holding portion for holding the substrate to be processed and the other end having a portion to be pressed, an urging member provided on the rotary table, for urging the holding portion of each of the plurality of holding members towards a center of the rotary table, a pressing member provided underneath the rotary table for pressing the portion to be pressed to a direction opposite to the urging direction of the urging member, and a drive mechanism for driving the pressing member in up and down directions.

REFERENCES:
patent: 4421056 (1983-12-01), Tateyama et al.
patent: 4724619 (1988-02-01), Poli et al.
patent: 4788994 (1988-12-01), Shinbara
patent: 5100502 (1992-03-01), Murdock
patent: 5421056 (1995-06-01), Tateyama et al.
patent: 5445172 (1995-08-01), Thompson et al.
patent: 5566466 (1996-10-01), Hearne
patent: 5666985 (1997-09-01), Smith, Jr. et al.
patent: 5830272 (1998-11-01), Begin et al.
patent: 5851041 (1998-12-01), Anderson et al.

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