Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1993-09-30
1994-05-17
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Multizone chamber
118715, 118726, 4272556, 427237, 427238, C23C 1600
Patent
active
053124898
ABSTRACT:
Apparatus are disclosed for coating the inside surfaces of hollow objects with a coating material by vapor deposition wherein the objects are removably attached to a rotary fixture which is employed for holding the objects while the coating process is being conducted. The rotary fixture comprises a hollow chamber rotatably mounted about an axis of rotation wherein the chamber can have a plurality of connecting union assemblies which secure the objects and provide communication between the inside surfaces of the objects and the inside space of the hollow chamber. The coating material is introduced from the interior space of the hollow chamber to the interior space of the objects under vacuum conditions.
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Bueker Richard
Union Carbide Chemicals & Plastics Technology Corporation
Volles W. K.
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