Rotary electrostatic microactuator with area-efficient comb elec

Details Rotary electrostatic microactuator with area-efficient comb elec Rotary electrostatic microactuator with area-efficient comb elec

1997-12-30

1999-11-30

Wolff, John H.

Dynamic magnetic information storage or retrieval

Record transport with head stationary during transducing

Drum record

361283, G11B 555, H01G 700

Patent

active

059953349

ABSTRACT:
A rotary microactuator that includes a stationary structure formed on a substrate and a movable structure attached to the stationary structure by a flexure. The stationary structure has at least one branch, with each branch of the stationary structure having at least one electrode finger. The movable structure has at least one branch and a center of rotation about which the movable structure rotates. Each branch of the movable structure has at least one electrode finger. Each branch of the movable structure is separated from an adjacent branch of the stationary structure by a minimum-required distance along the branch of the movable structure. The minimum-required distance is based on an electrostatic attractive force generated between the branch of the movable structure and a branch of the stationary structure that is adjacent to the branch of the movable structure and is located in a direction from the branch of the movable structure that is opposite to a direction that the branch of the movable structure is driven. Additionally, the minimum-required distance is based on a minimum length of the fingers of a branch of the movable structure and of a branch of the stationary structure that is necessary for producing a position-independent electrostatic force. Each finger is attached to a branch of the movable structure at a proximal end of the finger at an angle that is substantially perpendicular to a straight line between the proximal end of the finger and the center of rotation.

REFERENCES:
patent: 5521778 (1996-05-01), Boutaghou et al.
patent: 5711063 (1998-01-01), Budde et al.
patent: 5862015 (1999-01-01), Evans et al.
patent: 5867347 (1999-02-01), Knight et al.
D.A. Horsley et al., Angular Micropositioner For Disk Drives, Proceedings of the IEEE, Tenth Annual International Workshop on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Nagoya, Japan, Jan. 26-30, 1997.
Fan et al., Batch-Fabricated Area-Efficient Milli-Actuators, Solid-state Sensor And Actuator Workshop, Jun. 13-16, 1994, TRF Catalog No. 94TRF-0001, pp. 38-42.

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