Rotary-cup coating apparatus

Details Rotary-cup coating apparatus Rotary-cup coating apparatus

1994-07-20

1996-11-05

Czaja, Donald E.

Coating apparatus

Projection or spray type

Rotating work

118503, B05B 1304

Patent

active

055713246

ABSTRACT:
When a cylinder unit is actuated to extent its rod upwardly, a chuck is lifted above an inner cup to receive a planar workpiece such as a semiconductor wafer or a glass substrate. The chuck is now disengaged from the inner cup, and a stopper locks the chuck against rotation. After the planar workpiece has been supported on the chuck, the cylinder unit is actuated to retract its rod, bringing the chuck into its lowered position. The chuck is now engaged by the inner cup for corotation. Energization of a motor rotates the inner cup, which then rotates the chuck. Since the inner cup, which has a relatively large rotational inertia, is driven by the motor, interengaging portions of the inner cup and the chuck are less susceptible to damage.

REFERENCES:
patent: 3993018 (1976-11-01), Kranik et al.

Affiliated with

Also associated with

Rating

Rotary-cup coating apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rotary-cup coating apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rotary-cup coating apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2012060