Rotary coating apparatus

Details Rotary coating apparatus Rotary coating apparatus

1982-02-09

1983-11-22

McIntosh, John P.

Coating apparatus

With means to centrifuge work

118302, 118321, B05C 1108, B05C 1302

Patent

active

044162138

ABSTRACT:
The present invention relates to a rotary coating apparatus wherein liquid to be applied (diffusion agent, photo resist, and others) is dropped through a nozzle on a rotating glass plate or semiconductor wafer seated on top of a spindle to form coatings over their surfaces and a cap is fitted on the lower surface of the nozzle when not in use to provide sealing so that the space enclosed with said nozzle and said cap is filled with solvent vapor.

REFERENCES:
patent: 2028355 (1936-01-01), Russi
patent: 2336042 (1943-12-01), Smith
patent: 3524427 (1970-08-01), Glovatsky
patent: 4190015 (1980-02-01), Hillman
patent: 4347302 (1982-08-01), Gotman

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