Rotary barrel type induction vapor-phase growing apparatus

Details Rotary barrel type induction vapor-phase growing apparatus Rotary barrel type induction vapor-phase growing apparatus

1987-03-19

1988-12-27

Leung, Philip H.

Electric heating

Metal heating

Of cylinders

219 1067, 219 1079, 118730, 118 501, 118500, H05B 640, C23C 1600

Patent

active

047942207

ABSTRACT:
A barrel type vapor-phase growing apparatus includes a reaction cylinder with a seal plate provided for sealing the upper end of the reaction chamber. A radio-frequency heating coil is provided in the reaction cylinder. A susceptor is also provided in the reaction cylinder so as to surround the radio-frequency heating coil, and a number of semiconductor wafers supported on the surface of the susceptor are heated by the radio-frequency heating coil. A rotating device is provided on the seal plate, and a suspension member is coupled with the rotating device for suspending and rotating the susceptor within the reaction cylinder such that the upper end of the susceptor is held at a position lower than the upper end of the radio-frequency heating coil.

REFERENCES:
patent: 3384049 (1968-05-01), Capita
patent: 3699298 (1972-10-01), Briody
patent: 4496828 (1985-01-01), Kusmierz et al.
patent: 4579080 (1986-04-01), Martin et al.

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