Rotary apertured interferometric lithography (RAIL)

Radiation imagery chemistry: process – composition – or product th – Holographic process – composition – or product

Reexamination Certificate

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C359S035000, C430S002000

Reexamination Certificate

active

07459241

ABSTRACT:
A rotary apertured interferometric lithography (RAIL) system that includes interferometric lithography tools, a mask with a slit preferably with an arc shape, and a rotating stage is disclosed. The RAIL system could create a servo pattern of a recording-head trajectory of a hard disk drive in a master for magnetic-contact printing. The master can could be used to form arrays of sub-micron sized magnetic elements on a magnetic disk media for high-density magnetic recording applications.

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