X-ray or gamma ray systems or devices – Source – Target
Patent
1992-05-13
1993-11-02
Porta, David P.
X-ray or gamma ray systems or devices
Source
Target
378143, 378127, H01J 3510
Patent
active
052590151
ABSTRACT:
A rotary anode for use in an X-ray tube has a graphite substrate plate, an intermediate layer made of a metal that does not react with graphite, and an X-ray generating layer provided on the intermediate layer for generating X-rays when electron impact is applied. The intermediate layer is a rhenium film having an equiaxed grain structure. A method for manufacturing such a rotary anode is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200.degree. C. or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process.
REFERENCES:
patent: 4920012 (1990-04-01), Woodruff et al.
Katoh Yasuhiro
Kawai Hiromu
Ohara Hisanori
Takaoka Shigehiko
Porta David P.
Sumitomo Electric Industries Ltd.
Tokyo Tungsten Co., Ltd.
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