Rolling process cover

Details Rolling process cover Rolling process cover

2006-05-16

2006-05-16

Wilson, Gregory (Department: 3749)

Heating

Heating or heat retaining work chamber structure

Door, cover or port

C432S056000, C160S238000, C160S243000

Reexamination Certificate

active

07044732

ABSTRACT:
A cover for the opening of a process tube of a furnace used in semiconductor manufacturing is comprised of a substantially continuous sheet of metal so that it may be rolled opened and closed while being against the opening of the process tube by a guide frame. The roller on which the cover is rolled is driven by a bidirectional DC motor. The process tube cover can be operated by a computer or controller that operates the furnace.

REFERENCES:
patent: 2323828 (1943-07-01), Mayer
patent: 5655585 (1997-08-01), Fry
patent: 6612357 (2003-09-01), Beringer et al.

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