Roller positioning apparatus

Details Roller positioning apparatus Roller positioning apparatus

1996-08-29

1998-09-22

Herrmann, Allan D.

Machine element or mechanism

Mechanical movements

Reciprocating or oscillating to or from alternating rotary

269242, 269289MR, 414757, 414936, F16H 2520, B25J 502

Patent

active

058098321

ABSTRACT:
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.

REFERENCES:
patent: 3261479 (1966-07-01), Baker et al.
patent: 4483434 (1984-11-01), Miwa et al.
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4892455 (1990-01-01), Hine
patent: 5556085 (1996-09-01), Cyr

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