Coating processes – Nonuniform coating – Applying superposed diverse coatings or coating a coated base
Patent
1990-08-09
1991-07-02
Chiesa, Richard L.
Coating processes
Nonuniform coating
Applying superposed diverse coatings or coating a coated base
118224, 118249, 118255, 118262, 427402, 427428, B05D 136, B05C 112
Patent
active
050284576
ABSTRACT:
An improved roll coating apparatus and method includes a coating roll having a smooth surface for applying a resist, a doctor roll having grooves on its surface for supplying prescribed amount of the resist to the coating roll, and a back up roll which is in contact with the coating roll for conveying a substrate on which the resist is applied to a prescribed direction. Even if there are minute concave portions on the surface of the substrate, the resist is forced to fill the minute concave portions, since the resist is pressed and forced to be applied on the substrate by the coating roll having smooth surface and the back up roll.
REFERENCES:
patent: 2704530 (1955-03-01), Nilsen et al.
patent: 2772604 (1956-12-01), Muggleton
patent: 3301156 (1967-01-01), Roeber
patent: 3552353 (1971-01-01), Labombarde
patent: 3636918 (1972-01-01), Fischer et al.
patent: 4384544 (1983-05-01), Weishew
patent: 4524715 (1985-06-01), Abrams
patent: 4603060 (1986-07-01), Mitsuda et al.
Semiconductor World, 1987.7, pp. 160-165, 1987.
Kinose Kazuo
Tanaka Masato
Chiesa Richard L.
Dainippon Screen Mfg. Co,. Ltd.
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