Robust micromachined gyroscopes with two degrees of freedom...

Details Robust micromachined gyroscopes with two degrees of freedom... Robust micromachined gyroscopes with two degrees of freedom...

2007-10-23

2007-10-23

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

11204900

ABSTRACT:
A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope with nonresonant actuation with a drive direction, sense direction and a direction perpendicular to the drive and sense directions comprises a planar substrate, a 2-DOF sense-mode oscillator coupled to the substrate operated at a flattened wide-bandwidth frequency region, and a 1-DOF drive mode oscillator coupled operated at resonance in the flattened wide-bandwidth frequency region to achieve large drive-mode amplitudes.

REFERENCES:
patent: 6293148 (2001-09-01), Wang et al.
patent: 6393913 (2002-05-01), Dyck et al.
patent: 6691571 (2004-02-01), Willig et al.
patent: 2004/0149035 (2004-08-01), Acar et al.

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