Robust MEMS actuator for relays

Details Robust MEMS actuator for relays Robust MEMS actuator for relays

2007-10-02

2008-12-30

Pert, Evan (Department: 2826)

Electricity: electrothermally or thermally actuated switches

With diverse art-type device

C257S467000, C257S622000, C438S054000

Reexamination Certificate

active

07471184

ABSTRACT:
An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.

REFERENCES:
patent: 6407478 (2002-06-01), Wood et al.
patent: 7036312 (2006-05-01), Menard et al.
Agrawal, “A Latching MEMS Relay for DC and RF Applications”, Electrical Contacts, 2004, Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts, Sep. 22-23, 2005, pp. 222-225.
F. Pardo, U.S. Appl. No. 11/519,142, filed Sep. 11, 2006 for “Micro-Actuator and Locking Switch”.
F. Pardo, et al., U.S. Appl. No. 11/747,555, filed May 11, 2007 for “Electroless Plating Production of Nickel Aned Colbalt Structures”.

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