Electrical resistors – Resistance value responsive to a condition – Ambient temperature
Reexamination Certificate
2006-09-19
2006-09-19
Hoang, Tu (Department: 2832)
Electrical resistors
Resistance value responsive to a condition
Ambient temperature
C338S013000
Reexamination Certificate
active
07109842
ABSTRACT:
A robust sensor that incorporates the necessary physical structure and thermal characteristics is capable of measuring fluid flow and properties under harsh environmental conditions. The sensor die is made of a material with thermal conductivity tailored to provide the thermal transmission characteristics necessary to avoid saturation of the sensor, thus enabling the measurement of high mass flux airflow and liquid properties under high pressure and often harsh environments not previously available for silicon based sensors. The robust sensor further has internal vias for back-side electrical connection, thus avoiding electrical and mechanical interference with the measurements. All of these features come together to provide a microsensor which is capable of reliable, i.e. stable, wide dynamic range and rapid-response operation under harsh environments.
REFERENCES:
patent: 3680028 (1972-07-01), Black et al.
patent: 4085398 (1978-04-01), Bertram et al.
patent: 4400684 (1983-08-01), Kushida et al.
patent: 4703555 (1987-11-01), Hubner
patent: 4722609 (1988-02-01), Epstein et al.
patent: 4972708 (1990-11-01), Wiegleb et al.
patent: 5056362 (1991-10-01), Ang et al.
patent: 5057811 (1991-10-01), Strott et al.
patent: 5311775 (1994-05-01), Suski et al.
patent: 5353638 (1994-10-01), Marek
patent: 5372040 (1994-12-01), Hecht et al.
patent: 5428994 (1995-07-01), Wenzel et al.
patent: 5430428 (1995-07-01), Gerblinger et al.
patent: 5473304 (1995-12-01), Friese et al.
patent: 5550526 (1996-08-01), Mottahed
patent: 5798684 (1998-08-01), Endo et al.
patent: 5804720 (1998-09-01), Morimasa et al.
patent: 6028331 (2000-02-01), Mastromatteo et al.
patent: 6032527 (2000-03-01), Genova et al.
patent: 6098455 (2000-08-01), Nukui et al.
patent: 1008837 (2000-06-01), None
patent: 4-83301 (1992-03-01), None
NN79013227, IBM Technical Disclosure bulletin, Jan. 1979, vol. 21, iss. No. 8, p. 3227.
Bonne Ulrich
Haji-Sheikh Michael James
Padmanabhan Aravind
Fredrick Kris T.
Hoang Tu
Honeywell International , Inc.
LandOfFree
Robust fluid flow and property microsensor made of optimal... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Robust fluid flow and property microsensor made of optimal..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Robust fluid flow and property microsensor made of optimal... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3559738