Material or article handling – Apparatus for charging a load holding or supporting element... – Supply source capable of reversible 180 degrees revolution
Patent
1992-02-03
1993-12-21
Bucci, David A.
Material or article handling
Apparatus for charging a load holding or supporting element...
Supply source capable of reversible 180 degrees revolution
414217, 414226, 414331, 414416, 414937, 414939, 414941, 901 17, B65G 4907
Patent
active
052717020
ABSTRACT:
A robotic substrate manipulator constructed for substrate handling during thin film deposition in the vacuum of outer space. The robotic substrate manipulator includes a cassette holding a plurality of substrates preferably including six cassettes in a carousel. A circular cylinder encloses the carousel with an access door at a location accessible by a manipulator arm assembly. Substrates are retained within the cassette via a passive retention system. This manipulator arm assembly includes an arm with a gripper at one end. The gripper includes a pair of opposed fingers normally urged closed by at least one finger spring that may be opened by a solenoid. The manipulator arm assembly includes a vertical driver and a horizontal rotary driver permitting motion of substrates from the cassette to a processing station. Position gauges on both the vertical motion driver and the horizontal rotary motion driver permit feedback regarding the manipulator arm assembly position. In the preferred embodiment the processing station employs the vacuum of space in thin film deposition.
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Dobbs Michael E.
Jones Donald B.
Bucci David A.
Environmental research Institute of Michigan
Keenan James
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