Robotic storage buffer system for substrate carrier pods

Details Robotic storage buffer system for substrate carrier pods Robotic storage buffer system for substrate carrier pods

2006-05-02

2006-05-02

Black, Thomas G. (Department: 3663)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S254000, C700S264000, C700S229000, C414S201000, C414S217000, C414S277000, C206S710000, C206S711000, C318S568100

Reexamination Certificate

active

07039499

ABSTRACT:
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor. The robot can alternatively be mounted directly to the storage system enclosure structure.

REFERENCES:
patent: 2002/0009457 (2002-01-01), Bowersock et al.
patent: 2002/0068992 (2002-06-01), Hine et al.
patent: 2003/0113190 (2003-06-01), Bachrach

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