Robotic hand for transporting semiconductor wafer carriers

Details Robotic hand for transporting semiconductor wafer carriers Robotic hand for transporting semiconductor wafer carriers

1987-08-17

1989-03-28

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

414730, 901 39, B25J 1502

Patent

active

048167320

ABSTRACT:
A robotic element for lifting and moving semi-conductor wafer carriers and detecting collisions and correctness of engagement of the carrier to a robotic transport device. The element has a pair of spaced, parallel plates, a pair of rotary solenoids each fixed to one plate, and mounted between said plates and extending through the holes in said first plate for rotation therein. An engagement member is fixed to each of said rotary solenoids and extends outwardly from said first plate. The element also has a plurality of collision sensors and collision rebound means mounted between said plates.

REFERENCES:
patent: 3145333 (1964-08-01), Pardini et al.
patent: 4316329 (1982-02-01), Watson
patent: 4423998 (1984-01-01), Inaba et al.
patent: 4479673 (1984-10-01), Inaba et al.
patent: 4632623 (1986-12-01), Naumec
patent: 4645411 (1987-02-01), Madwed
patent: 4672741 (1987-06-01), Zafred et al.
Raibert, M. H. and J. J. Craig, "Hybrid Position /Force Control of Manipulators", Transactions of the ASMF, vol. 102, Jun. 1981, pp. 126-133.

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